Polymer Based Microfabrication and Its Applications in Optical Mems and Biomems

their professional advices and guidance on my research. experience with all kinds of fun. Finally, the author's grateful appreciation goes to his parents whose hardworking spirit and dedication to family have always been a great example for the author. Figure 2-1 Schematic diagram of tilted UV lithography in water medium (left: the experimental setup; right: optical refraction path). Figure 2-5 Out-of-plane microlens replication process: (a)-(c) PDMS molding, (d)-(f) curable Figure 2-6 SEM images of (a) SU-8 out-of-plane microlens array, (b) PDMS negative mold and (c) out-of-plane microlens array replica made of NOA 73 UV curable polymer .. Figure 2-7 Focal spot images of (a) SU-8 out-of-plane microlens array and (b) out-of-plane microlens array replica made of NOA 73 .. Figure 2-10 In-situ fabrication process of the out-of-plane microlens: (a) PDMS device, (b) curable pre-polymer injected, (c) applied pneumatic pressure, (d) microlens formed after Figure 2-12 Water filled microlens chamber under various pressures (a) 0 psi; (b) 10 psi; (c) 50 psi.